Optical measuring head

An optical measuring head for scattered light and ellipsometric measurement, has changeable aperture diaphragms, changeable grey and/or interference filters (6) and a polariser (2), arranged in a closed component (1). The polariser (2) is capable of defined rotation driven by a stepping motor (3) vi...

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Bibliographic Details
Main Author RUDOLPH GUENTER
Format Patent
LanguageEnglish
Published 06.12.1995
Edition5
Subjects
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:An optical measuring head for scattered light and ellipsometric measurement, has changeable aperture diaphragms, changeable grey and/or interference filters (6) and a polariser (2), arranged in a closed component (1). The polariser (2) is capable of defined rotation driven by a stepping motor (3) via a toothed belt (4). A sensor (5) determines a reference position of the plane of polarisation. The filters (6) are pivotably mounted on respective arms (8) on shafts (7) arranged symmetrically and concentrically around the optical axis (9) of the measuring head. The arms (8) are axially staggered, the angles of pivot of the arms (8) being limited by stops (10). Electric driving means (12) are fixed to extensions of the shafts (7) for independent actuation of the filters (6). High currents produced by overrunning of the arms (8) onto the stops (10) switch off the electric driving means (12). Two sensors (13) monitor the position of the arms (8).
Bibliography:Application Number: GB19930012018