HIGH DIELECTRIC CONSTANT CAPACITOR

A high dielectric constant capacitor incorporating a dielectric film comprised of at least a first dual-film layer, which includes a first tantalum oxide film (3), and a first metal oxide film (4) which is made of a metal oxide whose valence is smaller than that of tantalum, and whose dielectric con...

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Bibliographic Details
Main Authors YOUNGWUG KIM, KEEWON KWON
Format Patent
LanguageEnglish
Published 20.01.1993
Subjects
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