HIGH DIELECTRIC CONSTANT CAPACITOR
A high dielectric constant capacitor incorporating a dielectric film comprised of at least a first dual-film layer, which includes a first tantalum oxide film (3), and a first metal oxide film (4) which is made of a metal oxide whose valence is smaller than that of tantalum, and whose dielectric con...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.01.1993
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Subjects | |
Online Access | Get full text |
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