HIGH DIELECTRIC CONSTANT CAPACITOR

A high dielectric constant capacitor incorporating a dielectric film comprised of at least a first dual-film layer, which includes a first tantalum oxide film (3), and a first metal oxide film (4) which is made of a metal oxide whose valence is smaller than that of tantalum, and whose dielectric con...

Full description

Saved in:
Bibliographic Details
Main Authors YOUNGWUG KIM, KEEWON KWON
Format Patent
LanguageEnglish
Published 20.01.1993
Subjects
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:A high dielectric constant capacitor incorporating a dielectric film comprised of at least a first dual-film layer, which includes a first tantalum oxide film (3), and a first metal oxide film (4) which is made of a metal oxide whose valence is smaller than that of tantalum, and whose dielectric constant is equal to or greater than that of tantalum oxide. The high dielectric constant film preferably further includes a plurality of such additional dual-film layers formed on the first dual-film layer, to thereby provide a multilayer high dielectric constant film. Each of the additional dual-film layers is preferably of the same construction as that of the first dual-film layer.
Bibliography:Application Number: GB19920013070