STRUCTURE COMPOSITE COMPRENANT UNE COUCHE MINCE MONOCRISTALLINE SUR UN SUBSTRAT SUPPORT EN CARBURE DE SILICIUM POLY-CRISTALLIN ET PROCEDE DE FABRICATION ASSOCIE

• Main Authors: FERRATO, Marc, POTIER, Alexandre, BIARD, Hugo, BOMMIER, Christophe
• Format: Patent
• Language: French
• Published: 30.08.2024
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CRYSTAL GROWTH; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

Structure composite pour la fabrication de composants microélectroniques comprenant une couche mince monocristalline, disposée sur un substrat support en carbure de silicium polycristallin, ledit substrat support présentant, sur chacune de ses faces, une orientation cristalline préférentielle selon laquelle :- un coefficient de texture C422 est inférieur à 40%, et - la somme de coefficients de texture C220+C200+C400 est supérieure à 50%, de préférence supérieure à 80%. L'invention concerne également un procédé de fabrication d'une telle structure composite. Figure à publier avec l'abrégé : Pas de figure The invention relates to a composite structure for producing microelectronic components, comprising a monocrystalline thin film placed on a polycrystalline silicon carbide support substrate, said support substrate having a preferential crystal orientation on each of its faces, according to which: - a texture coefficient C422 is less than 40%, and - the sum of texture coefficients C220+C200+C400 is greater than 50%, preferably greater than 80%. The invention also relates to a method for producing such a composite structure. Figure to be published with the abstract: No figure