Optical detection device, for scanning near-field optical microscopy, comprises scanning near-field optical microscope tip, a vertical cavity surface emitting laser cavity and a photodetector monolithically integrated in the same structure

An optical detection device, comprises a scanning near-field optical microscope (SNOM) tip, a vertical cavity surface emitting laser (VCSEL) cavity and a photodetector monolithically integrated in the same structure. An Independent claim is also included for production of the above optical detection...

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Bibliographic Details
Main Authors SPAJER MICHEL, GORECKI CHRISTOPHE, BOUCHON DOMINIQUE, ARAKAWA YASUHIKO, PODLEKI JEAN, KHALFALLAH SABRY KHALIL, KAWAKATSU HIDEKI
Format Patent
LanguageEnglish
French
Published 28.04.2000
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:An optical detection device, comprises a scanning near-field optical microscope (SNOM) tip, a vertical cavity surface emitting laser (VCSEL) cavity and a photodetector monolithically integrated in the same structure. An Independent claim is also included for production of the above optical detection device structure. La présente invention concerne un dispositif de détection optique comprenant une pointe SNOM, une cavité laser, un photodétecteur, la dite pointe SNOM, la dite cavité laser et le dit photodétecteur sont assemblés monolithiquement dans une même structure, la cavité laser étant une cavité laser VCSEL. Le photodétecteur est soit situé sous l'ensemble constitué de la pointe SNOM et de la cavité laser VCSEL, soit situé entre la pointe SNOM et la cavité laser VCSEL.
Bibliography:Application Number: FR19980013333