Dispositif de mesure interferrométrique

PCT No. PCT/FR93/01194 Sec. 371 Date May 5, 1995 Sec. 102(e) Date May 5, 1995 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14028 PCT Pub. Date Jun. 23, 1994Two input beams (10, 20) of the interferometric measuring device, achieved according to the integrated optics technology, are broadened so as to for...

Full description

Saved in:
Bibliographic Details
Main Authors ANTOINE KEVORKIAN, ISABELLE DUPORT-SCABEIN, PIERRE BENECH
Format Patent
LanguageFrench
Published 13.01.1995
Edition5
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:PCT No. PCT/FR93/01194 Sec. 371 Date May 5, 1995 Sec. 102(e) Date May 5, 1995 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14028 PCT Pub. Date Jun. 23, 1994Two input beams (10, 20) of the interferometric measuring device, achieved according to the integrated optics technology, are broadened so as to form two spread flat beams creating an interference pattern (30). Two detectors (14, 15) supply two measuring signals, preferably in phase quadrature, representative of two points of the interference plane.
Bibliography:Application Number: FR19920015002