Dispositif de mesure interferrométrique
PCT No. PCT/FR93/01194 Sec. 371 Date May 5, 1995 Sec. 102(e) Date May 5, 1995 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14028 PCT Pub. Date Jun. 23, 1994Two input beams (10, 20) of the interferometric measuring device, achieved according to the integrated optics technology, are broadened so as to for...
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Main Authors | , , |
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Format | Patent |
Language | French |
Published |
13.01.1995
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | PCT No. PCT/FR93/01194 Sec. 371 Date May 5, 1995 Sec. 102(e) Date May 5, 1995 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14028 PCT Pub. Date Jun. 23, 1994Two input beams (10, 20) of the interferometric measuring device, achieved according to the integrated optics technology, are broadened so as to form two spread flat beams creating an interference pattern (30). Two detectors (14, 15) supply two measuring signals, preferably in phase quadrature, representative of two points of the interference plane. |
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Bibliography: | Application Number: FR19920015002 |