HIGH VAPOR PRESSURE DELIVERY SYSTEM
A system includes a vaporizer vessel. The vaporizer vessel includes an outlet fluidly connected to the vaporizer vessel. A heater is configured to heat the vaporizer vessel. A valve is configured to regulate a pressure of a vaporized material at the outlet. In response to the pressure at the outlet...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
04.09.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A system includes a vaporizer vessel. The vaporizer vessel includes an outlet fluidly connected to the vaporizer vessel. A heater is configured to heat the vaporizer vessel. A valve is configured to regulate a pressure of a vaporized material at the outlet. In response to the pressure at the outlet being outside a set pressure range, the heater is configured to increase or decrease heat to the vaporizer vessel. |
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Bibliography: | Application Number: EP20220888003 |