DOUBLE LAYER MEMS DEVICES

The present invention relates to a MEMS device and a method of manufacturing a MEMS device. The MEMS device comprises a handle layer comprising at least one cavity and at least one suspension structure, a first device layer comprising at least one static electrode, a second device layer comprising a...

Full description

Saved in:
Bibliographic Details
Main Authors MATTI, Liukku, TORKKELI, Altti, OKAWA, Tadayuki, FUKUMITSU, Mazakasu, BLOMQVIST, Anssi, KILPINEN, Petteri, RYTKÖNEN, Ville-Pekka
Format Patent
LanguageEnglish
French
German
Published 28.08.2024
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:The present invention relates to a MEMS device and a method of manufacturing a MEMS device. The MEMS device comprises a handle layer comprising at least one cavity and at least one suspension structure, a first device layer comprising at least one static electrode, a second device layer comprising at least one seismic element moveably suspended above the first device layer and a cap layer. The at least one seismic element acts as the at least one moveable electrode or the at least one seismic element is mechanically coupled to move with the at least one moveable electrode. The handle layer, the first device layer, the second device layer and the cap layer, a first electrically insulating layer between the handle layer and the first device layer, and a second electrically insulating layer between the first device layer and the second device layer are configured to form an enclosure comprising the at least one seismic element, at least one static electrode and the at least one moveable electrode.
Bibliography:Application Number: EP20230158813