COMPACT MEMS TWO-DIMENSIONAL MEMS SCANNING MIRROR ASSEMBLY DESIGN AND RELATED ASPECTS

A micro-electro-mechanical system, MEMS, two-dimensional scanning mirror assembly (310), the scanning mirror assembly having an optical design comprising a moveable MEMS scanning mirror having a reflective surface (334), a point light source (308a) for a light beam, a collimating lens assembly (516)...

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Bibliographic Details
Main Author HART, Robert H
Format Patent
LanguageEnglish
French
German
Published 28.08.2024
Subjects
DIAGNOSIS
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SURGERY
TESTING
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Summary:A micro-electro-mechanical system, MEMS, two-dimensional scanning mirror assembly (310), the scanning mirror assembly having an optical design comprising a moveable MEMS scanning mirror having a reflective surface (334), a point light source (308a) for a light beam, a collimating lens assembly (516) configured to receive light from the light source and output a collimated light beam with an exit beam diameter above a threshold towards the reflective surface (334), and an objective lens assembly (510, 512) via which a collimated light beam reflected from the reflective surface exists the scanning mirror assembly. The reflective surface (334) is configured to reflect an incident collimated light beam to form a probe beam (312) which exits the mirror assembly as a telecentric beam (312) towards a telecentric image plane with a resolution better than a threshold for the telecentric beam resolution. The optics of the scanning mirror assembly are configured to provide a total track length, L, from the point light source to the telecentric image plane (700) less than 40mm.
Bibliography:Application Number: EP20230158510