SENSOR DIE WITH A DIAPHRAGM

A sensor die (100) includes a diaphragm (110) having a first membrane (130) and a second membrane (140) positioned within the first membrane (130). The first membrane (130) is deflectable in proportion with a differential pressure between a first side (112) of the diaphragm (110) and a second side (...

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Bibliographic Details
Main Authors Fong, Jeffrey C, O'Brien, Daniel T
Format Patent
LanguageEnglish
French
German
Published 21.08.2024
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A sensor die (100) includes a diaphragm (110) having a first membrane (130) and a second membrane (140) positioned within the first membrane (130). The first membrane (130) is deflectable in proportion with a differential pressure between a first side (112) of the diaphragm (110) and a second side (114) of the diaphragm (110) opposite the first side (112). The second membrane (140) is deflectable simultaneously with the first membrane (130) in proportion with an absolute pressure on the first side (112) of the diaphragm (110).
Bibliography:Application Number: EP20240157840