MONOLITHIC GLASS MEMBRANE, DOUBLE VERTICAL MEMBRANE ARRANGEMENT, MICROMECHANICAL SPRING STRUCTURE AND ASSOCIATED PRODUCTION METHOD

In order to expand the application possibilities of micromechanical bending structures 2 in glass, it is proposed to form vertical membranes 1 monolithically in the glass substrate 3 that extend transverse to a substrate plane 5 of a glass substrate 3, by creating blind holes 8 by means of a laser-i...

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Bibliographic Details
Main Authors OSTHOLT, Roman, BERTKE, Maik, AMBROSIUS, Norbert, DUNKER, Daniel, SCHUDAK, Svenja, SCHNEIDER, Sergej
Format Patent
LanguageEnglish
French
German
Published 30.10.2024
Subjects
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Summary:In order to expand the application possibilities of micromechanical bending structures 2 in glass, it is proposed to form vertical membranes 1 monolithically in the glass substrate 3 that extend transverse to a substrate plane 5 of a glass substrate 3, by creating blind holes 8 by means of a laser-induced modification of the glass substrate 3 and subsequent wet chemical etching. This makes it possible not only to arrange bending structures 2 inside the body 40 of the glass substrate 3, but also to form spring structures 19 and solid state joints 35 monolithically, in particular in the depth of the glass substrate 3. This also enables novel actuation concepts in glass.
Bibliography:Application Number: EP20230787113