PHASE CHANGE MEMORY CELL WITH SPACER

A phase change memory (PCM) cell includes an electrode, a heater electrically connected to the electrode, a PCM material electrically connected to the heater, a second electrode electrically connected to the PCM material, an electrical insulator surrounding the PCM material, and a shield positioned...

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Bibliographic Details
Main Authors OK, Injo, SANKARAPANDIAN, Muthumanickam, MCDERMOTT, Steven, SIMON, Andrew, SARAF, Iqbal, SAULNIER, Nicole
Format Patent
LanguageEnglish
French
German
Published 26.06.2024
Subjects
ELECTRICITY
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Summary:A phase change memory (PCM) cell includes an electrode, a heater electrically connected to the electrode, a PCM material electrically connected to the heater, a second electrode electrically connected to the PCM material, an electrical insulator surrounding the PCM material, and a shield positioned between the PCM material and the electrical insulator, the shield comprising a reactive-ion-etching-resistant material.
Bibliography:Application Number: EP20220768348