OBJECT HOLDER AND MANUFACTURING METHOD

An object holder is configured to support an object. The object holder comprises a core body (61) comprising a plurality of burls (62) having distal ends (63) in a support plane (64) for supporting the object. The object holder further comprises an electrostatic sheet (65) between the burls. The ele...

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Bibliographic Details
Main Author VAN DRENT, William, Peter
Format Patent
LanguageEnglish
French
German
Published 22.05.2024
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:An object holder is configured to support an object. The object holder comprises a core body (61) comprising a plurality of burls (62) having distal ends (63) in a support plane (64) for supporting the object. The object holder further comprises an electrostatic sheet (65) between the burls. The electrostatic sheet comprises an electrode (66) comprising a metal, and metal oxide layers (67,68) comprising an oxide of the metal. The electrode is sandwiched between the metal oxide layers.
Bibliography:Application Number: EP20220208395