APPARATUS FOR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR LITHOGRAPHY MASKS

The present invention relates to an apparatus (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for lithography masks, wherein the hollow body (12) comprises a base wall (32) and one or more side walls (34), which form a hollow body...

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Bibliographic Details
Main Author SCHIENLE, Frank
Format Patent
LanguageEnglish
French
German
Published 08.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:The present invention relates to an apparatus (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for lithography masks, wherein the hollow body (12) comprises a base wall (32) and one or more side walls (34), which form a hollow body inner surface (33), and an opening (36) opposite the base wall (32), which is enclosed by an edge surface (38) of the side wall (34). The apparatus (10) comprises a support wall (20) on which the hollow body (12) can be placed with the edge surface (38), a cleaning device (10), with which a first cleaning fluid for cleaning the hollow body inner surface (33) can be dispensed when the hollow body (12) is connected to the support wall (20), and a supply device (37) arranged in the support wall (20) or fastened to the support wall (20), with which a rinsing fluid can be fed to the edge surface (38), wherein the supply device (37) comprises a movable element (38), which is movable towards the edge surface (38) with the rinsing fluid.
Bibliography:Application Number: EP20230735597