STRUCTURED SUBSTRATE, METHOD FOR MANUFACTURING THE STRUCTURED SUBSTRATE, AND USE OF THE STRUCTURED SUBSTRATE

The invention relates to a structured substrate (1), preferably for applications in micro systems technology, such as for micro optical systems, comprising: a planar substrate (10), preferably comprising glass material, and having two opposing planar surfaces (12, 14), at least one through-hole (20)...

Full description

Saved in:
Bibliographic Details
Main Authors MÄÄTTÄNEN, Antti, SOHR, Dr. Oliver, LEUGNER, Sebastian, THOMAS, Dr. Jens Ulrich
Format Patent
LanguageEnglish
French
German
Published 06.03.2024
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Online AccessGet full text

Cover

More Information
Summary:The invention relates to a structured substrate (1), preferably for applications in micro systems technology, such as for micro optical systems, comprising: a planar substrate (10), preferably comprising glass material, and having two opposing planar surfaces (12, 14), at least one through-hole (20) extending through the material of the planar substrate forming an inner wall surface surrounding the through-hole and connecting the two opposing planar surfaces, and a light absorbing coating (30) covering at least some areas of the inner wall surface of the through-hole. The invention further relates to method of manufacturing said structured substrate and to use of said structured substrate.
Bibliography:Application Number: EP20220192686