METHOD FOR MONITORING AND CONTROL OF PULSED LASER MICRO-PROCESSING AND APPARATUS FOR CARRYING OUT THIS METHOD
Subject-matter of the invention is the method for monitoring and control of pulsed laser micro-processing, wherein the laser pulses repeatedly impinge on the workpiece (10), which is heated by them and emits the thermal radiation (12), which is detected by the detection system (3), which creates the...
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
21.02.2024
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Subjects | |
Online Access | Get full text |
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Summary: | Subject-matter of the invention is the method for monitoring and control of pulsed laser micro-processing, wherein the laser pulses repeatedly impinge on the workpiece (10), which is heated by them and emits the thermal radiation (12), which is detected by the detection system (3), which creates the time course of the signal, and in the time course of the signal the changes are found corresponding to changes in the state, structure or properties of the material of the workpiece (10), caused by at least one laser pulse, and by using these changes at least one characteristic number is determined, which has a dimension of time or signal, and the value of the characteristic number is compared with a range of values predetermined for a correctly performed operation, and in case of an incorrect value of the characteristic number the parameters of the pulsed laser micro-processing are corrected, this method of monitoring and control of the pulsed laser micro-processing being repeated within the laser micro-processing, as well as the apparatus for carrying out the method for monitoring and control of pulsed laser micro-processing comprising a detection optical system (1), a detection system (3), a recording system (4), an evaluation system (5), a control system (6), a laser (7) and a laser optical system (8), and the recording system (4) comprising an analog-to-digital converter, the evaluation system (5) comprising a programmable gate array and the detection optical system (1) comprising a scanning head. |
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Bibliography: | Application Number: EP20210851962 |