LIGHT SOURCE, MEMS OPTICAL SWITCH, SENSOR AND METHODS FOR MANUFACTURING THE SAME

• Main Authors: TAS, Niels Roelof, BERENSCHOT, Johan Willem, MARTINUSSEN, , Simen Mikalsen, TIGGELAAR, Roald Michel, GARCIA BLANCO, Sonia Maria
• Format: Patent
• Language: English; French; German
• Published: 14.02.2024
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The present invention relates to a light source for generating an optical frequency comb. The present invention further relates to a method for manufacturing the optical resonator used in this light source. The present invention additionally relates to microelectromechanical systems, MEMS, optical switch and system comprising the same. The present invention also relates to a sensor and to a method for manufacturing a suspended silicon nitride structure comprised in the sensor. According to the present invention, a single-step LPCVD deposited monolithic stoichiometric Si3N4 layer is used on a mono-crystalline aluminum oxide substrate such as sapphire. The thickness of the Si3N4 layer exceeds 500 nm. This layer can be realized with relatively low residual stress.