METHOD OF DETERMINING A PARASITIC FORCE OF AN ACTUATOR OF AN OPTICAL COMPONENT, CONTROL METHOD FOR AN ACTUATOR, OPTICAL SYSTEM, PROJECTION SYSTEM AND LITHOGRAPHIC APPARATUS
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
10.01.2024
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Subjects | |
Online Access | Get full text |
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Bibliography: | Application Number: EP20220183960 |
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