PROCESSING DEVICE AND INSPECTION APPARATUS FOR OPTICAL INSPECTION AND CORRESPONDING METHODS

• Main Authors: ZHANG, Fei, ZHOU, YuanPing, FENG, Shengwei, LI, Minquan, YANG, ChunXin, ZHAO, Wei, JIAO, Linqi
• Format: Patent
• Language: English; French; German
• Published: 10.01.2024
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; GAMMA RAY OR X-RAY MICROSCOPES; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; IRRADIATION DEVICES; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR

A processing device to be used for optical inspection of samples is configured to be communicatively coupled to a camera of an optical inspection device and to a user interface, to receive input data from the user interface and/or from the camera, to provide output data to the user interface, to be communicatively coupled to a storage device, to provide instructions, by accessing instruction data stored at the storage device, for optical quality inspection of samples to be performed by a user via the user interface. The instructions include instructions regarding what kind of optical quality inspection to be performed on which sample. The processing device is further configured to receive quality report data from the optical quality inspection via the user interface, and/or image data of images acquired by the camera, and to store the quality report data and/or the image data in the storage device.