CHARGED PARTICLE BEAM DEVICE AND IMAGE ACQUISITION METHOD

• Main Authors: TSUTSUMI, Kenichi, IKEO, Nobuyuki
• Format: Patent
• Language: English; French; German
• Published: 10.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

A charged particle beam device (100) that acquires an image by scanning a specimen with a probe formed from a charged particle beam and detecting a signal emitted from the specimen (S), the charged particle beam device includes: an optical system (20) that forms the probe from the charged particle beam and scans the specimen (S) using the probe; a control unit (80) that repeatedly performs correction processing for correcting shifting of an irradiation position of the probe on the specimen (S) and image acquisition processing for acquiring a frame image (F) by causing the optical system to scan an observation region of the specimen (S) using the probe; and an image processing unit (90) that generates an image of the specimen (S) based on a plurality of the frame images (F), wherein, in the correction processing, the control unit (80) acquires a reference image by causing the optical system to scan the observation region using the probe, and corrects the shifting of the irradiation position of the probe based on a position shift amount between a base image and the reference image, and the image processing unit (90) acquires position shift information relating to a position shift between the base image and the reference image, corrects a position shift between the frame images (F) based on the position shift information, and generates an image of the specimen (S) based on the plurality of corrected frame images.