THERMAL DETECTION ELEMENT AND IMAGE SENSOR

• Main Authors: KADONO Koji, ANO Taishi, OOISHI Ryota, IMAIZUMI Shinji
• Format: Patent
• Language: English; French; German
• Published: 29.11.2023
• Subjects: COLORIMETRY; ELECTRICITY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING

Provided is a thermal type detection element that enables high sensitivity and high speed response while reducing the size of the element.A thermoelectric conversion element 10 includes: a substrate 11; a thin film thermoelectric conversion layer 12 that is stacked on the substrate 11; a first electrode 13 on a high temperature side that is disposed on one surface of the thermoelectric conversion layer 12; a second electrode 15 on a low temperature side that is disposed on the other surface of the thermoelectric conversion layer 12; and an absorption layer 18 that is stacked in contact with the one surface of the thermoelectric conversion layer 12 and absorbs heat received from the outside. In the thermoelectric conversion element 10, the one surface is an upper surface of the thermoelectric conversion layer 12, the other surface is a lower surface of the thermoelectric conversion layer 12, the first electrode 13 is disposed at a contact surface between a lower surface of the absorption layer 18 and the upper surface of the thermoelectric conversion layer 12, and the second electrode 15 is disposed at a contact surface between the lower surface of the thermoelectric conversion layer 12 and a front surface of the substrate.