ENCLOSURE SYSTEM

• Main Authors: CHA, Jae Jung, LEE, Sung Jin
• Format: Patent
• Language: English; French; German
• Published: 15.11.2023
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

The present invention relates to an enclosure system which enables a worker to maintain equipment inside an enclosure while keeping a gas atmosphere inside the enclosure. To this end, an enclosure system of the present invention comprises: a process unit moving chamber including a first maintenance opening hole through which one side portion of a process unit is exposed and a second maintenance opening hole through which the other side portion of the process unit is exposed, the process unit moving chamber moving integrally with the process unit; a management unit moving chamber including a management opening hole through which a management portion of a management unit is exposed, and moving integrally with the management unit; and a fixed chamber connected to a door installed at one side wall part of an enclosure to form a predetermined space, the fixed chamber including a docking opening hole extending toward the inside of the enclosure, wherein through movement of the process unit and the management unit, the process unit moving chamber and the management unit moving chamber come in close contact with each other to allow the first maintenance opening hole and the management opening hole to communicate with each other, the process unit moving chamber and the fixed chamber come in close contact to allow the second maintenance opening hole and the docking opening hole to communicate with each other, and thus the process unit moving chamber, the management unit moving chamber, and the fixed chamber form one sealed space.