MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED DIELECTRIC OXIDE UNDERLAYER AND METHOD FOR DEPOSITING SAID MATERIAL

The invention relates to a material including a substrate (30) coated on one face (29) with a stack of thin films (14) comprising at least one metal functional layer (140) and further comprising: - an oxide underlayer based on zinc, ZnO (129), between 0.3 and 4.4 nm; - a mixed oxide dielectric under...

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Bibliographic Details
Main Authors GUIMARD, Denis, ORVEN, Matthieu, BARRES, Thomas
Format Patent
LanguageEnglish
French
German
Published 25.10.2023
Subjects
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