CONTACT OVER ACTIVE GATE STRUCTURES WITH UNIFORM AND CONFORMAL GATE INSULATING CAP LAYERS FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION

• Main Authors: WALLACE, Charles H, GANESAN, Krishna, MUNASINGHE, Chanaka D, GULER, Leonard P, GHANI, Tahir
• Format: Patent
• Language: English; French; German
• Published: 03.01.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Contact over active gate (COAG) structures with uniform and conformal gate insulating cap layers, and methods of fabricating contact over active gate (COAG) structures using uniform and conformal gate insulating cap layers, are described. In an example, an integrated circuit structure includes a gat...