RADICAL GENERATION DEVICE AND ION ANALYSIS DEVICE

• Main Author: FURUTA, Masaji
• Format: Patent
• Language: English; French; German
• Published: 26.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; TESTING

One mode of a radical generation device according to the present invention includes: a cylindrical tube (410) made of a dielectric material and having an inside into which a plasma raw material is introduced; an antenna (411) made of a conductor material and wound around the cylindrical tube; an outer conductor part (412) having an inside into which the cylindrical tube is inserted, and having a conductive inner peripheral surface being coaxial with the cylindrical tube and having a cross section which is concentric circular; and a connection part (420) which is a cylindrical body inserted into a gap between the inner peripheral surface of the outer conductor part and an outer peripheral surface of the cylindrical tube, and is in contact with the inner peripheral surface of the outer conductor part together with the antenna to electrically connect the outer conductor part and the antenna; in which the connection part has a double cylindrical tube structure including an inner cylindrical body (421) and an outer cylindrical body (424), end portions of the inner cylindrical body and the outer cylindrical body on the same side are divided in a circumferential direction notches extending in an axial direction to form a plurality of divided pieces (421b, 424b), and tapered portions (421c) swelling outward toward a tip end are formed on an outer side of the divided pieces of the inner cylindrical body or tapered portions (421c) swelling inward toward a tip end are formed on an inner side of the divided pieces of the outer cylindrical body.