SOLAR CELL, SOLAR MODULE AND METHOD OF PRODUCING A SOLAR CELL
A solar cell having a rear layer stack, wherein the rear layer stack has the following layer sequence: an AlOx layer, a first SiNx layer, a second SiNx layer, an SiOxNy layer, a third SiNx layer and at least one further layer, selected from the group consisting of SiOxNy, SiOx, AlOx, AINx and AlF. T...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
05.07.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A solar cell having a rear layer stack, wherein the rear layer stack has the following layer sequence: an AlOx layer, a first SiNx layer, a second SiNx layer, an SiOxNy layer, a third SiNx layer and at least one further layer, selected from the group consisting of SiOxNy, SiOx, AlOx, AINx and AlF. The invention further relates to a solar module comprising the solar cell, and a method of producing the solar cell, wherein the rear layer stack is deposited on a substrate in a tubular PECVD system with a boat as a substrate holder. |
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Bibliography: | Application Number: EP20210786756 |