SOLAR CELL, SOLAR MODULE AND METHOD OF PRODUCING A SOLAR CELL

A solar cell having a rear layer stack, wherein the rear layer stack has the following layer sequence: an AlOx layer, a first SiNx layer, a second SiNx layer, an SiOxNy layer, a third SiNx layer and at least one further layer, selected from the group consisting of SiOxNy, SiOx, AlOx, AINx and AlF. T...

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Bibliographic Details
Main Authors SCHWABEDISSEN, Axel, JUNGHÄNEL, Matthias, PETERS, Stefan
Format Patent
LanguageEnglish
French
German
Published 05.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A solar cell having a rear layer stack, wherein the rear layer stack has the following layer sequence: an AlOx layer, a first SiNx layer, a second SiNx layer, an SiOxNy layer, a third SiNx layer and at least one further layer, selected from the group consisting of SiOxNy, SiOx, AlOx, AINx and AlF. The invention further relates to a solar module comprising the solar cell, and a method of producing the solar cell, wherein the rear layer stack is deposited on a substrate in a tubular PECVD system with a boat as a substrate holder.
Bibliography:Application Number: EP20210786756