UNSUPERVISED PATTERN SYNONYM DETECTION USING IMAGE HASHING
Images of semiconductor wafers can be hashed to determine a fixed length hash string for each of the images. Pattern synonyms can be determined from the hash strings. The pattern synonyms can be grouped. A degree of similarity between images in the groups is adjustable via a hamming distance. This c...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
28.06.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Images of semiconductor wafers can be hashed to determine a fixed length hash string for each of the images. Pattern synonyms can be determined from the hash strings. The pattern synonyms can be grouped. A degree of similarity between images in the groups is adjustable via a hamming distance. This can be used for various applications, including determination of latent defects. |
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Bibliography: | Application Number: EP20210867462 |