METHOD OF PROCESSING A SAMPLE WITH A CHARGED PARTICLE ASSESSMENT SYSTEM

Methods of processing a sample and charged particle assessment systems are disclosed. In one arrangement, a sample is processed using a multi-beam of sub-beams of charged particles. At least a portion of a sub-beam processable area is processed with each sub-beam. The sub-beam processable area compr...

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Bibliographic Details
Main Authors VAN SOEST, Jurgen, WIELAND, Marco, Jan-Jaco, KUIPER, Vincent, Sylvester
Format Patent
LanguageEnglish
French
German
Published 21.06.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:Methods of processing a sample and charged particle assessment systems are disclosed. In one arrangement, a sample is processed using a multi-beam of sub-beams of charged particles. At least a portion of a sub-beam processable area is processed with each sub-beam. The sub-beam processable area comprising an array of sections having rows of sections and columns of sections. Each row of sections defines an elongate region that is substantially equal to or smaller than a pitch at the sample surface of the sub-beams in the multi-beam. A plurality of the sections are processed.
Bibliography:Application Number: EP20210216074