STRAIN SENSOR AND STRAIN SENSOR ARRANGEMENT

• Main Author: WINGER, Martin
• Format: Patent
• Language: English; French; German
• Published: 21.06.2023
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

A strain sensor, comprises a substrate (1) and a strain sensing layer (2) of polycrystalline piezoelectric material. The strain sensing layer (2) is supported by the substrate (1) and extends in a plane in parallel to a plane (x,y) of the substrate (1). The strain sensing layer (2) is arranged between a top electrode (3) and a bottom electrode (4), each extending in parallel to the plane (x,y) of the substrate (1). The strain sensing layer (2) has a thickness of equal to or less than 2 µm perpendicular to its plane extension and is linked with the substrate (1) to have strain (ST) in the plane (x,y) of the substrate (1) couple into the strain sensing layer (2) as in-plane strain (ST). The polycrystalline piezoelectric material of the strain sensing layer (2) is configured to convert the in-plane strain (ST) in the strain sensing layer (2) into an electric field (EF) perpendicular to the plane of the strain sensing layer (2), resulting in a difference of potential between the top electrode (3) and the bottom electrode (4) representing a strain signal.