OPTICAL SCANNING DEVICE, METHOD FOR DRIVING SAME, AND IMAGE DRAWING SYSTEM

• Main Authors: HISHINUMA, Yoshikazu, NAONO, Takayuki
• Format: Patent
• Language: English; French; German
• Published: 17.01.2024
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; TRANSPORTING

Provided is an optical scanning device including: a mirror portion having a reflecting surface for reflecting incident light; a first actuator that allows the mirror portion to swing around a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state; a second actuator that allows the mirror portion to swing around a second axis which is located in the plane including the reflecting surface of the mirror portion in the stationary state and is orthogonal to the first axis; a pair of first angle detection sensors that output a signal corresponding to an angle of the mirror portion around the first axis, the pair of first angle detection sensors being disposed at positions facing each other across the first axis or the second axis; and at least one processor, in which the processor generates a first angle detection signal representing the angle of the mirror portion around the first axis by adding or subtracting a pair of first output signals output from the pair of first angle detection sensors.