OPTICAL SCANNING DEVICE AND METHOD FOR DRIVING MICROMIRROR DEVICE

In a micromirror device, in a case where a resonance frequency around a first axis is denoted by f1 and a resonance frequency around a second axis is denoted by f2, a relationship of f1 < f2 is satisfied, and in a case where a mirror portion is driven around the first axis and the second axis sim...

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Bibliographic Details
Main Authors NISHIURA, Yosuke, NAONO, Takayuki, AOSHIMA, Keisuke
Format Patent
LanguageEnglish
French
German
Published 10.01.2024
Subjects
ANALOGOUS ARRANGEMENTS USING OTHER WAVES
DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES
LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES
MEASURING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
RADIO DIRECTION-FINDING
RADIO NAVIGATION
TESTING
TRANSPORTING
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Summary:In a micromirror device, in a case where a resonance frequency around a first axis is denoted by f1 and a resonance frequency around a second axis is denoted by f2, a relationship of f1 < f2 is satisfied, and in a case where a mirror portion is driven around the first axis and the second axis simultaneously, the resonance frequency around the first axis changes by Δf from f1. A first driving signal and a second driving signal each having a driving frequency fd satisfying a relationship of f1-Δf < fd are provided to a first actuator and a second actuator, respectively, to cause the mirror portion to perform precession.
Bibliography:Application Number: EP20210842366