MEANS AND METHODS OF MEASURING REFRACTION
In an embodiment, multiple conjugate planes are used to create a plurality of optical pupil planes and a plurality of image planes. These optical planes solve multiple problems and introduce significant performance enhancements in the system. In one implementation of a disclosed embodiment, the meas...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
24.05.2023
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Subjects | |
Online Access | Get full text |
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Summary: | In an embodiment, multiple conjugate planes are used to create a plurality of optical pupil planes and a plurality of image planes. These optical planes solve multiple problems and introduce significant performance enhancements in the system. In one implementation of a disclosed embodiment, the measurement channel is based on the reverse Shack-Hartmann principle. By introducing a relay system (for example a 4-f lens system) the slit plane could be made conjugate to the measured system pupil plane (unlike a previous implementation where the slits were places away from the pupil plane as it was not accessible directly). Creating a virtual pupil plane allows for more accurate placement of the plane without the need for contact with the measured optical system. |
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Bibliography: | Application Number: EP20210842812 |