SEMICONDUCTOR DEVICE HAVING AN OPTICAL DEVICE DEGRADATION SENSOR

A semiconductor device includes: a semiconductor body (100); an electrical device (102) formed in an active region (104) of the semiconductor body (100), the active region (104) including an interface between the semiconductor body (100) and an insulating material; and a sensor (106) having a bandwi...

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Bibliographic Details
Main Authors AICHINGER, Thomas, KABAKOW, Andre, FEIL, Maximilian Wolfgang, REISINGER, Hans
Format Patent
LanguageEnglish
French
German
Published 19.04.2023
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A semiconductor device includes: a semiconductor body (100); an electrical device (102) formed in an active region (104) of the semiconductor body (100), the active region (104) including an interface between the semiconductor body (100) and an insulating material; and a sensor (106) having a bandwidth tuned to at least part of an energy spectrum of light (604) emitted by carrier recombination at the interface when the electrical device (102) is driven between accumulation and inversion, wherein an intensity of the emitted light (604) is proportional to a density of charge trapping states (108) at the interface, wherein the sensor (106) is configured to output a signal that is proportional to the intensity of the sensed light. Corresponding methods of monitoring and characterizing the semiconductor device and a test apparatus are also described.
Bibliography:Application Number: EP20220198049