PIEZOELECTRIC ASSEMBLY AND PROCESS OF FORMING A PIEZOELECTRIC ASSEMBLY
Piezoelectric assembly, which comprises a substrate of Ni, Cu, or steel, a first oriented layer assembled on the substrate and a piezoelectric layer on the oriented layer. The piezoelectric layer has a degree of (100) orientation with respect to the local surface normal of 90% or more.
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
12.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Piezoelectric assembly, which comprises a substrate of Ni, Cu, or steel, a first oriented layer assembled on the substrate and a piezoelectric layer on the oriented layer. The piezoelectric layer has a degree of (100) orientation with respect to the local surface normal of 90% or more. |
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Bibliography: | Application Number: EP20210730873 |