HIGH PRESSURE AND VACUUM LEVEL SENSOR IN METROLOGY RADIATION SYSTEMS

Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fue...

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Bibliographic Details
Main Authors CAVALIER, Grant, Steven, TREES, Dietmar, Uwe, Herbert, ATENCIO, Edgardo, Zamora, RAI, Sandeep, TEDROW, Jon, David, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew, SWERDLOW, Ethan, Marcus, BESSEMS, David
Format Patent
LanguageEnglish
French
German
Published 05.04.2023
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Summary:Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.
Bibliography:Application Number: EP20210723675