MULTILAYER CAPACITOR WITH EDGE INSULATOR

Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal lay...

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Bibliographic Details
Main Authors YOUNG, Ian, TUNG, I-Cheng, LIN, Chia-Ching, METZ, Mathew, Oguz, Kaan, CHANG, Sou-Chi, SEN GUPTA, Arnab, AVCI, Uygar E
Format Patent
LanguageEnglish
French
German
Published 29.03.2023
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Summary:Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal layers during manufacturing. The dielectric layers may include Perovskite-based materials. Other embodiments may be described and/or claimed.
Bibliography:Application Number: EP20220183014