MULTILAYER CAPACITOR WITH EDGE INSULATOR
Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal lay...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
29.03.2023
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Online Access | Get full text |
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Summary: | Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal layers during manufacturing. The dielectric layers may include Perovskite-based materials. Other embodiments may be described and/or claimed. |
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Bibliography: | Application Number: EP20220183014 |