MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL
The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), of between 0.3 and 4.4 nm; - a dielectric underlayer of tit...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
08.03.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), of between 0.3 and 4.4 nm; - a dielectric underlayer of titanium-based oxide, TiOx (127), which is located under and in contact with said underlayer of zinc-based oxide, ZnO (129), with a physical thickness of the dielectric underlayer of titanium-based oxide TiOx (127) of between 5.0 and 50.0 nm; - an overlayer of zinc-based oxide, ZnO (161), of between 2.0 and 10.0 nm: - a dielectric overlayer (165). |
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Bibliography: | Application Number: EP20210732400 |