CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLECTING UNITS
Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle microscopes are provided. The improvements include design, fabrication and adjustment of multi-beam raster units including apertures of specific shape a...
Saved in:
| Main Authors | , , , , , , , |
|---|---|
| Format | Patent |
| Language | English French German |
| Published |
18.01.2023
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle microscopes are provided. The improvements include design, fabrication and adjustment of multi-beam raster units including apertures of specific shape and dimensions. The improvements can enable multi-beam generation and multi-beam deflection or stigmation with higher precision. The improvements can be relevant for routine applications of multi-beam charged particle microscopes, for example in semiconductor inspection and review, where high reliability and high reproducibility and low machine-to-machine deviations are desirable. |
|---|---|
| AbstractList | Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle microscopes are provided. The improvements include design, fabrication and adjustment of multi-beam raster units including apertures of specific shape and dimensions. The improvements can enable multi-beam generation and multi-beam deflection or stigmation with higher precision. The improvements can be relevant for routine applications of multi-beam charged particle microscopes, for example in semiconductor inspection and review, where high reliability and high reproducibility and low machine-to-machine deviations are desirable. |
| Author | ZEIDLER, Dirk LENKE, Ralf RIEDESEL, Christof FRITZ, Hans KURIJ, Georg MAJOR, András, G BIHR, Ulrich SAROV, Yanko |
| Author_xml | – fullname: RIEDESEL, Christof – fullname: KURIJ, Georg – fullname: FRITZ, Hans – fullname: ZEIDLER, Dirk – fullname: LENKE, Ralf – fullname: MAJOR, András, G – fullname: SAROV, Yanko – fullname: BIHR, Ulrich |
| BookMark | eNrjYmDJy89L5WTwdXYNCnH09FPw9A0I8g9z9XX1CwlW8HdT8A31CfHUdXJ19FVwd_VzDXIM8fRzV3D0c0GWcXF183F1BsuE-nmGBPMwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUknjXABNDQwszc2NHQ2MilAAAt70vkw |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | CERTAINES AMÉLIORATIONS APPORTÉES À DES UNITÉS DE GÉNÉRATION ET DE DÉVIATION DE FAISCEAUX MULTIPLES BESTIMMTE VERBESSERUNGEN VON MEHRSTRAHLERZEUGUNGS- UND MEHRSTRAHLABLENKEINHEITEN |
| ExternalDocumentID | EP4118673A1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_EP4118673A13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 14:36:59 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English French German |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_EP4118673A13 |
| Notes | Application Number: EP20210712715 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230118&DB=EPODOC&CC=EP&NR=4118673A1 |
| ParticipantIDs | epo_espacenet_EP4118673A1 |
| PublicationCentury | 2000 |
| PublicationDate | 20230118 |
| PublicationDateYYYYMMDD | 2023-01-18 |
| PublicationDate_xml | – month: 01 year: 2023 text: 20230118 day: 18 |
| PublicationDecade | 2020 |
| PublicationYear | 2023 |
| RelatedCompanies | Carl Zeiss MultiSEM GmbH |
| RelatedCompanies_xml | – name: Carl Zeiss MultiSEM GmbH |
| Score | 3.447082 |
| Snippet | Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle microscopes... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLECTING UNITS |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230118&DB=EPODOC&locale=&CC=EP&NR=4118673A1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3NT8IwFH8haNSbokb8Sg9mt0XHvg_EbF0nM-wjMAg3ssGWcBlEZvz3fa0DueileelLXtqX_tq-9vVXgCcjx223beiyZtm5jEjMZNtUNXmBoZjeK7LSEr9EhJExmGjvM33WgtXuLYzgCf0S5IiIqAXivRbz9eb3EMsTuZXb53yFVetXP-17UhMd9_hwtSTP7bMk9mIqUYqSFI36msKZ21QHA6Uj3EWbHAxs6vJHKZvDFcU_h-MEjVX1BbSKqgOndPfxWgdOwua-G8UGettLCCkbpU4QkSBMRvFUkPCPSeyTcDJMA9llTkh-8tDSIHojTuQdajzmDxkVGoz40vEVEJ-ldCBju-Z7H8xZsu-Beg3tal0VN0D0UlOWL7aZq5wGD4tSzTQrM9WyVKzSNLvQ_dPM7T-6OzjjzuRHDYp1D-3647N4wMW3zh-F274BpZeA3w |
| link.rule.ids | 230,309,783,888,25576,76876 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3NT8IwFH8haMSbokb87MHstujY94GYsXUy3VegEG5kwy3hMojM-O_7WgG56KV56Ute2pf-2r729VeAByPHbbdt6LJm2bmMSMxk21Q1eY6hmN4tstISv0REsTEYa69TfdqAxfYtjOAJ_RLkiIioOeK9FvP16vcQyxO5levHfIFVy2ef9TxpEx13-XC1JK_fo2niJa7kuihJ8bCnKZy5TXUwUDrAHbbJwUAnff4oZbW_ovgncJiisao-hUZRtaHlbj9ea8NRtLnvRnEDvfUZRC4dMieISRClw2QiSPhHJPFJNA5ZIPepE5GfPDQWxC_Eib19jUf9kLpCgxEfG50D8SlzBzK2a7bzwYymux6oF9CsllVxCUQvNeX9yTZzldPgYVGqmWZlplqWilWaZgc6f5q5-kd3D60Bi8JZGMRv13DMHcuPHRTrBpr1x2dxiwtxnd8JF34D3NaD0g |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=CERTAIN+IMPROVEMENTS+OF+MULTI-BEAM+GENERATING+AND+MULTI-BEAM+DEFLECTING+UNITS&rft.inventor=RIEDESEL%2C+Christof&rft.inventor=KURIJ%2C+Georg&rft.inventor=FRITZ%2C+Hans&rft.inventor=ZEIDLER%2C+Dirk&rft.inventor=LENKE%2C+Ralf&rft.inventor=MAJOR%2C+Andr%C3%A1s%2C+G&rft.inventor=SAROV%2C+Yanko&rft.inventor=BIHR%2C+Ulrich&rft.date=2023-01-18&rft.externalDBID=A1&rft.externalDocID=EP4118673A1 |