OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE AND LITHOGRAPHIC SYSTEM
The present invention relates to an optical isolator for a seed laser, comprising:- an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and- at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising:∘ a cooli...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
14.12.2022
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Subjects | |
Online Access | Get full text |
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