OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE AND LITHOGRAPHIC SYSTEM

• Main Authors: DILISSEN, Ruben Hendrik C, MULDER, Heine Melle, CZARNOTA, Tomasz, BOSSCHAART, Karel Joop
• Format: Patent
• Language: English; French; German
• Published: 14.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DEVICES USING STIMULATED EMISSION; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; X-RAY TECHNIQUE

The present invention relates to an optical isolator for a seed laser, comprising:- an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and- at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising:∘ a cooling element including one or more channels for a fluidic cooling medium,∘ a heat transfer assembly arranged between the crystal and the cooling element to transfer heat from the crystal to the cooling element, wherein the heat transfer assembly includes an active heat transfer element.