OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE AND LITHOGRAPHIC SYSTEM
The present invention relates to an optical isolator for a seed laser, comprising:- an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and- at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising:∘ a cooli...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
14.12.2022
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to an optical isolator for a seed laser, comprising:- an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and- at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising:∘ a cooling element including one or more channels for a fluidic cooling medium,∘ a heat transfer assembly arranged between the crystal and the cooling element to transfer heat from the crystal to the cooling element, wherein the heat transfer assembly includes an active heat transfer element. |
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Bibliography: | Application Number: EP20210178433 |