SCROLL VACUUM PUMP WITH INTEGRATED PRESSURE SENSOR

• Main Authors: Becker, Jonas, Söhngen, Wolfgang, Willig, Michael, Bernhardt, Gernot, Kallenborn, Stefan, Schaefer, Heiko, Pauli, Lars, Hofmann, Jan, Wangorsch, Verena, Harapat, Erhard
• Format: Patent
• Language: English; French; German
• Published: 22.02.2023
• Subjects: BLASTING; ENGINE PLANTS IN GENERAL; HEATING; LIGHTING; MACHINES OR ENGINES IN GENERAL; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; STEAM ENGINES; WEAPONS

Scrollpumpe (20), umfassend einen in die Scrollpumpe (20) integrierten Drucksensor (60) oder mehrere in die Scrollpumpe (20) integrierte Drucksensoren (60),wobei der Drucksensor (60) in einem Kühlluftstrom einer Kühleinrichtung (44), insbesondere eines Lüfters (44), der Scrollpumpe (20) angeordnet ist, insbesondere wobei der Drucksensor zumindest im Wesentlichen am Anfang des Kühlluftstromes, nämlich benachbart zu einem Lüfter und/oder innerhalb einer Luftleithaube (46), angeordnet ist,und/oder wobei der Drucksensor (60) innerhalb einer Luftleithaube (46) der Scrollpumpe (20) angeordnet und in ein feststehendes Spiralbauteil (24) der Scrollpumpe (20) eingeschraubt ist. A vacuum pump includes a fan including a rotational speed to be controlled to cool the vacuum pump, a temperature sensor, and a control device that regulates the rotational speed of the fan in dependence on a power consumption of a drive of the vacuum pump and on a temperature measured by the temperature sensor. Another vacuum pump includes an electrically driven fan, an air guide hood, and a conductor that leads from the fan to a supply connection for the fan. The conductor is connected to the supply connection via an electrical connector. The connector is separated from an air flow path, defined by the air guide hood, by a partition wall.