POWER DEVICE AND METHOD OF MANUFACTURING THE SAME

A power device includes a channel layer (110); a source (131) and a drain (132) at respective sides of the channel layer; a gate (150) on the channel layer between the source and the drain; a passivation layer (160) covering the source, the drain, and the gate; and a plurality of field plates (171-1...

Full description

Saved in:
Bibliographic Details
Main Authors PARK, Junhyuk, KIM, Joonyong, KIM, Jongseob, HWANG, Sunkyu
Format Patent
LanguageEnglish
French
German
Published 12.10.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:A power device includes a channel layer (110); a source (131) and a drain (132) at respective sides of the channel layer; a gate (150) on the channel layer between the source and the drain; a passivation layer (160) covering the source, the drain, and the gate; and a plurality of field plates (171-173) in the passivation layer. The plurality of field plates have different thicknesses (D1-D3). The plurality of field plates may have different widths (W1-W3), different pattern shapes, or both different widths and different pattern shapes.
Bibliography:Application Number: EP20210193464