SUBLIMATION AMPOULE WITH LEVEL SENSING

A solids delivery ampule includes an ampule body defining an interior space. The interior space contains one or more solids support, and each solids support configured to support a quantity of a sublimation solid. The solids delivery ampule also includes a vapor outlet ports, one or more level senso...

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Bibliographic Details
Main Authors NAITO, Donn K, BATTLE, Scott L, GREGG, John N
Format Patent
LanguageEnglish
French
German
Published 22.11.2023
Subjects
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Summary:A solids delivery ampule includes an ampule body defining an interior space. The interior space contains one or more solids support, and each solids support configured to support a quantity of a sublimation solid. The solids delivery ampule also includes a vapor outlet ports, one or more level sensor ports, and one or more level sensors. Each of the one or more level sensors extending through the one or more level sensor port into the interior space. Each of the one or more level sensors measures the quantity of the sublimation solid in each solids support.
Bibliography:Application Number: EP20200878968