SUBLIMATION AMPOULE WITH LEVEL SENSING

• Main Authors: NAITO, Donn K, BATTLE, Scott L, GREGG, John N
• Format: Patent
• Language: English; French; German
• Published: 22.11.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METALLURGY; METERING BY VOLUME; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING

A solids delivery ampule includes an ampule body defining an interior space. The interior space contains one or more solids support, and each solids support configured to support a quantity of a sublimation solid. The solids delivery ampule also includes a vapor outlet ports, one or more level sensor ports, and one or more level sensors. Each of the one or more level sensors extending through the one or more level sensor port into the interior space. Each of the one or more level sensors measures the quantity of the sublimation solid in each solids support.