TRANSFER DEVICE AND FILM FORMING DEVICE USING SAME

• Main Authors: OGO, Yoshinori, AOYAMA, Takaaki
• Format: Patent
• Language: English; French; German
• Published: 17.08.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a highly productive, compact, and inexpensive film deposition apparatus while ensuring the stability of the film deposition quality, the apparatus comprises: a rotating body (21) configured to be rotatable and provided with a holding unit (212) that holds an object (3) to be transferred in an attachable and detachable manner, the holding unit (212) being provided along an outer peripheral portion of the rotating body (21); and a transfer mechanism (22) having a gripping mechanism (223) capable of gripping and releasing the object (3), the transfer mechanism (22) transferring the object (3) held by a predetermined device (111) to the holding unit (212) of the rotating body (21) and transferring another object (3) held by the rotating body (21) to the predetermined device (111).