METHOD FOR MANUFACTURING RARE EARTH MAGNET
The method for manufacturing a rare earth magnet according to the present invention includes: disposing plural sintered articles (7) side by side with a jig (6) in such a manner that first surfaces (21) of the plural sintered articles (7) are along a plane in parallel to a vertical direction, formin...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
18.10.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The method for manufacturing a rare earth magnet according to the present invention includes: disposing plural sintered articles (7) side by side with a jig (6) in such a manner that first surfaces (21) of the plural sintered articles (7) are along a plane in parallel to a vertical direction, forming a film on the first surfaces (21) of the plural sintered articles (7) disposed side by side with the jig (6) in a first film forming treatment chamber (5) having provided therein a target (4) disposed on a side of the first surfaces (21) of the plural sintered articles (7), forming a film on second surfaces (22) of the plural sintered articles (7) disposed side by side with the jig (6) in a second film forming treatment chamber (25), which is juxtaposed with the first film forming treatment chamber (5), having provided therein a target (4) disposed on a side of the second surfaces (22) of the plural sintered articles (7), and moving the plural sintered articles (7) disposed side by side with the jig (6) in a horizontal direction between the first film forming treatment chamber (5) and the second film forming treatment chamber (25). According to the present invention, a method for manufacturing a rare earth magnet that is capable of manufacturing a high-performance rare earth magnet with stable quality in large amount by the grain boundary diffusion method utilizing a film formed by the physical vapor phase deposition method is provided. |
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Bibliography: | Application Number: EP20200864703 |