METHOD FOR MANUFACTURING RARE EARTH MAGNET

• Main Authors: HIROTA, Koichi, OHASHI, Tetsuya, NAKAMURA, Hajime
• Format: Patent
• Language: English; French; German
• Published: 27.07.2022
• Subjects: ALLOYS; BASIC ELECTRIC ELEMENTS; CASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; FERROUS OR NON-FERROUS ALLOYS; INDUCTANCES; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAGNETS; MAKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; METALLURGY; PERFORMING OPERATIONS; POWDER METALLURGY; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSFORMERS; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WORKING METALLIC POWDER

The method for manufacturing a rare earth magnet according to the present invention includes: disposing plural sintered articles (7) side by side with a jig (6) in such a manner that first surfaces (21) of the plural sintered articles (7) are along a plane in parallel to a vertical direction, forming a film on the first surfaces (21) of the plural sintered articles (7) disposed side by side with the jig (6) in a first film forming treatment chamber (5) having provided therein a target (4) disposed on a side of the first surfaces (21) of the plural sintered articles (7), forming a film on second surfaces (22) of the plural sintered articles (7) disposed side by side with the jig (6) in a second film forming treatment chamber (25), which is juxtaposed with the first film forming treatment chamber (5), having provided therein a target (4) disposed on a side of the second surfaces (22) of the plural sintered articles (7), and moving the plural sintered articles (7) disposed side by side with the jig (6) in a horizontal direction between the first film forming treatment chamber (5) and the second film forming treatment chamber (25). According to the present invention, a method for manufacturing a rare earth magnet that is capable of manufacturing a high-performance rare earth magnet with stable quality in large amount by the grain boundary diffusion method utilizing a film formed by the physical vapor phase deposition method is provided.