TERAHERTZ SENSOR MODULE FOR SPECTROSCOPY AND IMAGING

• Main Authors: ASHIWAL, Vijendrakumar K, REDDY, Vusthla Sunil, RAMISETTI, Sireesha, CHEN, Chia-Chi, AGBOH, Peter M
• Format: Patent
• Language: English; French; German
• Published: 15.06.2022
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; TESTING

Embodiments of a terahertz (THz) sensor module are disclosed for spectroscopy and imaging in a dynamic environment. In an embodiment, a terahertz (THz) sensor module comprises: a THz emitter configured to emit a THz beam into an environment; one or more movable micro-electromechanical system (MEMS) micromirrors; and one or more MEMS motors or actuators coupled to the one or more MEMS micromirrors. The one or more MEMS motors or actuators are configured to move the one or more MEMS micromirrors to change a direction of the THz beam in the environment. A THz receiver is configured to receive a reflection of the THz beam from a reflective object in the environment.