DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT

A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including a measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards t...

Full description

Saved in:
Bibliographic Details
Main Authors GODAVARTHI, Charankumar, COURTEVILLE, Alain
Format Patent
LanguageEnglish
French
German
Published 28.08.2024
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online AccessGet full text

Cover

More Information
Summary:A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including a measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam, a positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured, and a digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view.
Bibliography:Application Number: EP20190779530